The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 10, 2018

Filed:

Sep. 03, 2015
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Makoto Furuhata, Matsumoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5747 (2012.01); G01C 19/574 (2012.01);
U.S. Cl.
CPC ...
G01C 19/574 (2013.01);
Abstract

A physical quantity sensor element of the invention is formed into a plane-shape along an XY plane, and is provided with two driving portions which vibrate in a Z-axis direction, two detecting portions, four beam portions which connect one driving portion and one detecting portion, four beam portions which connect the other detecting portion and the other driving portion, and a coupling portion of which one end is connected to a portion in one of the driving portion and the other end is connected to a portion in the other diving portion in which the each of the deriving portions includes a beam portion which is connected to the end portion of the coupling portion and is deformable so as to reduce a change of a posture of each of the driving portions with respect to an XY plane.


Find Patent Forward Citations

Loading…