The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 10, 2018

Filed:

Sep. 03, 2015
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Makoto Furuhata, Matsumoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5747 (2012.01); G01C 19/574 (2012.01);
U.S. Cl.
CPC ...
G01C 19/574 (2013.01);
Abstract

A physical quantity sensor element is formed into a plane-shape which extends along an XY plane, and is provided with a driving portion which vibrates in a Z-axis direction, a detecting portion which vibrates in an X-axis direction due to Coriolis effect acting on the driving portion, a beam portion which connects the driving portion and the detecting portion, a fixing portion, and a beam portion which connects the detecting portion and the fixing portion, in which a spring constant of the beam portion in the Z-axis direction is smaller than a spring constant of the beam portion in the Z-axis direction, and a spring constant of the beam portion in the Z-axis direction is greater than a spring constant of the beam portion in the X-axis direction.


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