The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2018
Filed:
Mar. 31, 2015
Japan Fine Ceramics Co., Ltd., Miyagi, JP;
Dai Kusano, Miyagi, JP;
Gen Tanabe, Miyagi, JP;
Kiyoshi Hirao, Aichi, JP;
Hideki Hyuga, Aichi, JP;
You Zhou, Aichi, JP;
Japan Fine Ceramics Co., LTD., Miyagi, JP;
Abstract
A method for producing a silicon nitride substrate includes a raw material powder preparation step of preparing a raw material powder containing a silicon powder, a rare earth element compound, and a magnesium compound, wherein, when the amount of silicon in the raw material powder is expressed in terms of a silicon nitride content, the raw material powder contains the rare earth element compound at 1 mol % to 7 mol % in terms of an oxide content and contains the magnesium compound at 8 mol % to 15 mol % in terms of an oxide content; a sheet forming step of forming the raw material powder into a sheet article; a nitriding step of heating the sheet article in a nitrogen atmosphere at 1200° C. to 1500° C. and nitriding silicon contained in the sheet article; and a sintering step of sintering the sheet article under a nitrogen atmosphere after the nitriding step.