The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2018
Filed:
Oct. 09, 2012
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Oleg Byl, Southbury, CT (US);
Edward E. Jones, Woodbury, CT (US);
Chiranjeevi Pydi, Danbury, CT (US);
Joseph D. Sweeney, New Milford, CT (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01J 7/00 (2006.01); C01B 35/06 (2006.01); B01J 8/02 (2006.01); B01J 15/00 (2006.01); B01J 19/00 (2006.01); B01J 19/12 (2006.01); B01J 3/03 (2006.01);
U.S. Cl.
CPC ...
C01B 35/061 (2013.01); B01J 3/03 (2013.01); B01J 7/00 (2013.01); B01J 15/00 (2013.01); B01J 19/0073 (2013.01); B01J 19/129 (2013.01); B01J 2219/00094 (2013.01); B01J 2219/00148 (2013.01); B01J 2219/0254 (2013.01); B01J 2219/0272 (2013.01); B01J 2219/0277 (2013.01); B01J 2219/0886 (2013.01); Y02P 20/149 (2015.11);
Abstract
A reaction system and method for preparing compounds or intermediates from solid reactant materials is provided. In a specific aspect, a reaction system and methods are provided for preparation of boron-containing precursor compounds useful as precursors for ion implantation of boron in substrates. In another specific aspect, a reactor system and methods are provided for manufacture of boron precursors such as BF.