The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2018
Filed:
Mar. 05, 2013
Applicant:
Oerlikon Surface Solutions Ag, Trubbach, Trubbach, CH;
Inventors:
Siegfried Krassnitzer, Feldkirch, AT;
Juerg Hagmann, Sax, CH;
Assignee:
OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON, Pfäffikon SZ, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/34 (2006.01); C23C 14/54 (2006.01); C09J 7/02 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3497 (2013.01); C09J 7/026 (2013.01); C23C 14/34 (2013.01); C23C 14/3407 (2013.01); C23C 14/54 (2013.01); H01J 37/3411 (2013.01); H01J 37/3417 (2013.01); H01J 37/3435 (2013.01); H01J 2237/002 (2013.01);
Abstract
The invention relates to a target which is embodied as a material source for a depositing method from the gas phase, comprising a front side and a rear side, characterized in that a self-adhesive carbon film is applied to the rear side. Said target can be embodied as a material source for a sputtering method and/or for an arc evaporation method. A particular advantage is that the target is used in a coating source with indirect cooling, the self-adhesive carbon film being in contact with the surface of the membrane which is part of a cooling channel.