The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 03, 2018

Filed:

Nov. 26, 2013
Applicant:

Korea Basic Science Institute, Daejeon, KR;

Inventors:

Ki Soo Chang, Daejeon, KR;

Seon Young Ryu, Chungcheongbuk-do, KR;

Woo June Choi, Daejeon, KR;

Geon Hee Kim, Sejong, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 25/72 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01N 25/72 (2013.01); H01L 22/12 (2013.01);
Abstract

The present invention provides a method for analyzing defects by using heat distribution measurement, comprising: a sample loading unit for loading a sample to check whether or not there is a defect through heat distribution characteristics; a light source for radiating visible light onto the sample; a power supply unit for generating a driving signal in order to periodically heat the sample; a detection unit for detecting reflected light from the surface of the sample; and a signal generator for synchronizing the detection unit with the driving signal of the power supply unit.


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