The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2018
Filed:
Jan. 06, 2015
Samsung Display Co., Ltd., Yongin, Gyeonggi-do, KR;
Choel-Min Jang, Yongin, KR;
Myung-Soo Huh, Yongin, KR;
Jeong-Ho Yi, Yongin, KR;
Cheol-Rae Jo, Yongin, KR;
Sang-Joon Seo, Yongin, KR;
Seung-Hun Kim, Yongin, KR;
Jin-Kwang Kim, Yongin, KR;
Samsung Display Co., Ltd., Yongin-si, KR;
Abstract
A vapor deposition apparatus includes a stage on which a substrate is mounted; a heater unit that is disposed at a side of the stage and includes a first heater and a second heater, wherein the first heater and the second heater are movable so that the first heater and the second heater are spaced apart from each other or are disposed adjacent to each other; and a nozzle unit that is disposed at a side opposite to the side at which the heater unit is disposed about the stage and includes one or more nozzles.