The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 27, 2018

Filed:

Feb. 03, 2017
Applicant:

Hamamatsu Photonics K.k., Hamamatsu-shi, Shizuoka, JP;

Inventors:

Tatsuo Dougakiuchi, Hamamatsu, JP;

Akio Ito, Hamamatsu, JP;

Tadataka Edamura, Hamamatsu, JP;

Kazuue Fujita, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/3504 (2014.01); H01L 31/0352 (2006.01); H01L 31/0304 (2006.01); H01L 31/109 (2006.01); H01L 31/0216 (2014.01); H01L 31/0232 (2014.01);
U.S. Cl.
CPC ...
H01L 31/035236 (2013.01); G01N 21/3504 (2013.01); H01L 31/02161 (2013.01); H01L 31/02327 (2013.01); H01L 31/03042 (2013.01); H01L 31/03046 (2013.01); H01L 31/035281 (2013.01); H01L 31/109 (2013.01); G01N 2201/068 (2013.01); G01N 2201/0873 (2013.01);
Abstract

A quantum cascade detector includes a semiconductor substrate; an active layer having a cascade structure; a lower cladding layer provided between the active layer and the substrate and having a lower refractive index than the active layer; a lower metal layer provided between the lower cladding layer and the substrate; an upper cladding layer provided on an opposite side to the substrate with respect to the active layer and having a lower refractive index than the active layer; and an upper metal layer provided on an opposite side to the active layer with respect to the upper cladding layer. A first end face being in a waveguide direction in a waveguide structure with the active layer, lower cladding layer, and upper cladding layer is an entrance surface for light to be detected.


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