The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 27, 2018

Filed:

Sep. 27, 2016
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Victor Chan, Guilderland, NY (US);

Jin Ping Han, Fishkill, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/49 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66545 (2013.01); H01L 29/4966 (2013.01);
Abstract

A semiconductor device is provided with an electrically conductive gate having an enhanced gate profile. The semiconductor device includes a semiconductor substrate that extends along a first axis to define a length and a second axis opposite the first axis to define a height. A channel region is interposed between opposing source/drain regions, and a gate stack is atop the semiconductor substrate. The gate stack includes an electrically conductive gate atop the channel region. The electrically conductive gate includes sidewalls extending between a base and an upper surface to define a gate height. A gate length of the electrically conductive gate continuously increases as the gate height increases from the base to the upper surface.


Find Patent Forward Citations

Loading…