The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Jan. 06, 2017
Ulis, Veurey Voroize, FR;
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Michel Vilain, Saint Georges de Commiers, FR;
Jérôme Favier, Saint Laurent du Pont, FR;
Jean-Jacques Yon, Sassenage, FR;
Laurent Frey, Fontaine, FR;
Ulis, Veurey Voroize, FR;
Commissariat A L'Energie Atomique Et Aux Energies Alternatives, Paris, FR;
Abstract
A method of manufacturing a detector capable of detecting a wavelength range [λ; λ] centered on a wavelength λ, including: forming said device on a substrate by depositing a sacrificial layer totally embedding said device; forming, on the sacrificial layer, a cap including first, second, and third optical structures transparent in said range [Δ; λ], the second and third optical structures having equivalent refraction indexes at wavelength λrespectively greater than or equal to 3.4 and smaller than or equal to 2.3; forming a vent of access to the sacrificial layer through a portion of the cap, and then applying, through the vent, an etching to totally remove the sacrificial layer.