The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 27, 2018

Filed:

Nov. 01, 2016
Applicant:

Semiconductor Energy Laboratory Co., Ltd., Atsugi-shi, Kanagawa-ken, JP;

Inventors:

Shunpei Yamazaki, Setagaya, JP;

Toru Takayama, Atsugi, JP;

Junya Maruyama, Ebina, JP;

Yumiko Ohno, Atsugi, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 27/12 (2006.01); H01L 29/786 (2006.01); H01L 51/00 (2006.01); H01L 23/29 (2006.01); H01L 27/32 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1266 (2013.01); H01L 23/291 (2013.01); H01L 27/1214 (2013.01); H01L 27/3244 (2013.01); H01L 29/78603 (2013.01); H01L 51/0002 (2013.01); H01L 51/003 (2013.01); H01L 51/0021 (2013.01); H01L 51/0024 (2013.01); H01L 29/66757 (2013.01); H01L 2221/68368 (2013.01); H01L 2924/0002 (2013.01); Y10S 438/928 (2013.01); Y10S 438/982 (2013.01);
Abstract

It is an object of the present invention to provide a peeling method that causes no damage to a layer to be peeled and to allow not only a layer to be peeled with a small surface area but also a layer to be peeled with a large surface area to be peeled entirely. Further, it is also an object of the present invention to bond a layer to be peeled to various base materials to provide a lighter semiconductor device and a manufacturing method thereof. Particularly, it is an object to bond various elements typified by a TFT, (a thin film diode, a photoelectric conversion element comprising a PIN junction of silicon, or a silicon resistance element) to a flexible film to provide a lighter semiconductor device and a manufacturing method thereof.


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