The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Jun. 19, 2015
Applicant:
Toshiba Memory Corporation, Minato-ku, JP;
Inventor:
Kazuhiro Segawa, Kuwana, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/27 (2006.01); H01L 23/544 (2006.01); H01L 21/66 (2006.01); G03F 7/20 (2006.01); H01L 27/11582 (2017.01);
U.S. Cl.
CPC ...
H01L 23/544 (2013.01); G03F 7/70633 (2013.01); H01L 22/12 (2013.01); H01L 27/11582 (2013.01); H01L 2223/5442 (2013.01); H01L 2223/5446 (2013.01); H01L 2223/54426 (2013.01);
Abstract
According to one embodiment, an optical element branches reflection light from a first mark and a second mark having different focus positions, a first imaging element captures an image of the first mark based on a first branch light branched by the optical element, a second imaging element captures an image of the second mark based on a second branch light branched by the optical element, and an arithmetic processing unit that calculates a misalignment between the first mark and the second mark based on a result of superimposition of the image of the first mark and the image of the second mark.