The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Sep. 03, 2015
Kawasaki Jukogyo Kabushiki Kaisha, Kobe-shi, Hyogo, JP;
Kawasaki Robotics (Usa), Inc., Wixom, MI (US);
Hirohiko Goto, Akashi, JP;
Ming Zeng, San Jose, CA (US);
Avish Bharwani, Santa Clara, CA (US);
Shigeki Ono, Campbell, CA (US);
KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe, JP;
KAWASAKI ROBOTICS (USA), INC., Wixom, MI (US);
Abstract
A substrate transfer device includes a casing and a substrate conveying robot. A size of the casing in a second direction Y is more than a size of the casing in a first direction X. The casing includes walls forming a conveying chamber and at least one opening or provided at at least one side of the conveying chamber in the first direction X. The substrate conveying robot includes a base, a robot arm, a robot hand, and a controller. When a space in the conveying chamber except for a predetermined exclusive region is defined as an effective conveying chamber, an entire link length DL of a link is less than a conveying chamber size Dx, and an entire hand length Dh of the robot hand is not less than an effective conveying chamber size Dx'.