The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Oct. 06, 2014
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Joseph M. Ranish, San Jose, CA (US);
Oleg Serebryanov, San Jose, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F26B 3/30 (2006.01); F26B 19/00 (2006.01); A21B 2/00 (2006.01); H01L 21/67 (2006.01); H05B 3/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); H05B 3/0047 (2013.01);
Abstract
Embodiments described herein generally relate to an improved power distribution assembly for a lamphead assembly used in a thermal processing chamber. In one embodiment, the lamphead assembly includes a plurality of lamps for thermal processing of semiconductor substrates, and a power distribution assembly having a plurality of openings, the power distribution assembly provides power to the plurality of lamps, and each opening is sized to allow passage of the lamp therethough.