The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 27, 2018

Filed:

Jun. 24, 2014
Applicant:

Tanaka Kikinzoku Kogyo K.k., Tokyo, JP;

Inventors:

Takanobu Miyashita, Tsukuba, JP;

Yasuyuki Goto, Tsukuba, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B22F 3/12 (2006.01); H01J 37/34 (2006.01); C22C 19/05 (2006.01); C22C 38/30 (2006.01); C22C 19/07 (2006.01); C22C 32/00 (2006.01); C23C 14/34 (2006.01); G11B 5/851 (2006.01); H01F 41/18 (2006.01); C22C 1/04 (2006.01); B22F 1/02 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3426 (2013.01); C22C 19/05 (2013.01); C22C 19/07 (2013.01); C22C 32/0026 (2013.01); C22C 38/30 (2013.01); C23C 14/3407 (2013.01); C23C 14/3414 (2013.01); G11B 5/851 (2013.01); H01F 41/183 (2013.01); B22F 1/02 (2013.01); B22F 3/12 (2013.01); C22C 1/0433 (2013.01); C22C 2202/02 (2013.01);
Abstract

A process for producing a magnetron sputtering target includes: mixing and dispersing an oxide powder and a magnetic metal powder, the magnetic metal powder containing a ferromagnetic metal element, to obtain a magnetic powder mixture; mixing and dispersing an oxide powder and each of a plurality of non-magnetic metal powders, the plurality of non-magnetic metal powders containing the ferromagnetic metal element, the plurality of non-magnetic metal powders containing a different constituent element from each other or containing constituent elements at different ratios from each other, to obtain a plurality of non-magnetic powder mixtures; and mixing and dispersing the magnetic powder mixture and the plurality of non-magnetic powder mixtures to obtain a powder mixture for pressure sintering.


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