The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Jun. 02, 2015
Applicant:
Seagate Technology Llc, Cupertino, CA (US);
Inventors:
Shuaigang Xiao, Fremont, CA (US);
XiaoMin Yang, Livermore, CA (US);
ZhaoNing Yu, Palo Alto, CA (US);
Yautzong Hsu, Fremont, CA (US);
Assignee:
Seagate Technology LLC, Cupertino, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11B 5/855 (2006.01); G11B 5/74 (2006.01); H01L 21/00 (2006.01); H01L 21/302 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G11B 5/855 (2013.01); G03F 7/0002 (2013.01); G11B 5/746 (2013.01); H01L 21/00 (2013.01); H01L 21/302 (2013.01); Y10T 428/24802 (2015.01); Y10T 428/24926 (2015.01);
Abstract
Provided herein are apparatuses and methods, including patterning a first set of features in a servo zone to form a patterned servo zone while a first mask protects a data zone from the patterning. The first mask may be removed from the data zone. The apparatuses and methods may further include patterning a second set of features in the data zone to form a patterned data zone while a second mask protects the patterned servo zone from the patterning.