The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Oct. 06, 2015
Lam Research Corporation, Fremont, CA (US);
Roger Patrick, Mountain View, CA (US);
Chung Ho Huang, San Jose, CA (US);
Simon Gosselin, Menlo Park, CA (US);
Vincent Wong, Pleasanton, CA (US);
Ronald Ramnarine, Fremont, CA (US);
Neal K. Newton, San Jose, CA (US);
Mukesh Shah, Fremont, CA (US);
Kerwin Hoversten, San Ramon, CA (US);
Robert Ahrens, San Jose, CA (US);
Marco Mora, San Jose, CA (US);
LAM RESEARCH CORPORATION, Fremont, CA (US);
Abstract
Integration of semiconductor tool maintenance operations on mobile devices to allow technicians to more accurately perform semiconductor tool maintenance and to allow more accurate analysis of data to improve maintenance procedures to be more repeatable, consistent, and efficient. Remote control of maintenance operations for the semiconductor tool via a portable electronic device decreases the time required to service semiconductor tools and thus increase throughput.