The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 27, 2018

Filed:

May. 16, 2016
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Yoshihiko Suzuki, Funabashi, JP;

Junji Suzuki, Tama, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 26/08 (2006.01); B81C 1/00 (2006.01); B81C 3/00 (2006.01); G02B 26/02 (2006.01); G02B 26/06 (2006.01); G02B 5/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70191 (2013.01); B81C 1/00317 (2013.01); B81C 3/005 (2013.01); G02B 26/02 (2013.01); G02B 26/06 (2013.01); G02B 26/0833 (2013.01); G02B 26/0841 (2013.01); G03F 7/70291 (2013.01); B81B 2201/042 (2013.01); B81B 2207/012 (2013.01); B81C 2203/054 (2013.01); G02B 5/003 (2013.01);
Abstract

A spatial light modulation element module having a large area is manufactured. A spatial light modulation element module comprising a base member and a plurality of spatial light modulation element arrays, wherein each of the plurality of spatial light modulation element arrays has a light modulation element which modulates and emits at least one of the intensity and the phase of an incident light, and the base member maintains the plurality of spatial light modulation element arrays in a predetermined relative position in a bare chip state. In the above-described spatial light modulation element module, the plurality of spatial light modulation element arrays may be in a staggered arrangement in at least 1 direction.


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