The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Nov. 06, 2013
Applicant:
Analog Devices, Inc., Norwood, MA (US);
Inventors:
William A. Clark, Winchester, MA (US);
Xin Zhang, Acton, MA (US);
Assignee:
Analog Devices, Inc., Norwood, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01); G01P 21/00 (2006.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
G01P 15/125 (2013.01); G01P 21/00 (2013.01); G01P 2015/0814 (2013.01); G01P 2015/0868 (2013.01);
Abstract
An accelerometer has a movable mass suspended above a substrate, and a variable acceleration capacitor supported by the substrate. The movable mass has a mass anchor securing the mass to the substrate, while the acceleration capacitor has both a stationary finger extending from the substrate, and a movable finger extending from the movable mass. The accelerometer also has a variable stress capacitor, which also includes the stress finger, for determining movement of the mass anchor relative to the substrate.