The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 27, 2018

Filed:

Mar. 09, 2012
Applicants:

Satoshi Kawata, Osaka, JP;

Minoru Kobayashi, Osaka, JP;

Taisuke Ota, Osaka, JP;

Inventors:

Satoshi Kawata, Osaka, JP;

Minoru Kobayashi, Osaka, JP;

Taisuke Ota, Osaka, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 3/28 (2006.01); G01J 3/02 (2006.01); G02B 21/00 (2006.01); G01N 21/25 (2006.01); G01N 21/65 (2006.01);
U.S. Cl.
CPC ...
G01J 3/0205 (2013.01); G01J 3/0208 (2013.01); G01J 3/0229 (2013.01); G01N 21/255 (2013.01); G01N 21/65 (2013.01); G02B 21/0064 (2013.01);
Abstract

An optical microscope capable of performing measurement with a high resolution and a spectrometry method are provided. A spectrometry device according to an aspect of the present invention includes a Y-scanning unit that scans a spot position of the light beam on the sample, a beam splitter that separates, among the light beam incident on the sample, outgoing light, the outgoing light being emitted with a different wavelength, a spectroscope that spatially disperses the outgoing light separated by the beam splitter according to the wavelength, a detector that detects the outgoing light dispersed by the spectroscope, and a pinhole arraydisposed on an incoming side of the spectroscope, a plurality of pinholes being arranged in the pinhole array, the plurality of pinholes being adapted to allow outgoing light to pass therethrough to the spectroscope side.


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