The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Mar. 31, 2016
Applicant:
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Inventor:
Ken Oikawa, Tokyo, JP;
Assignee:
SUMITOMO HEAVY INDUSTRIES, LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B01D 8/00 (2006.01); F04B 37/08 (2006.01);
U.S. Cl.
CPC ...
F04B 37/08 (2013.01);
Abstract
A cryopump includes a top cryopanel that partitions a shield cavity into a shield cavity upper portion and a shield cavity lower portion. A radiation shield includes a shield main slit that communicates a shield outside gap into the shield cavity lower portion. The radiation shield may include a shield auxiliary slit that is formed at a different position from that of the shield main slit in an axial direction of the cryopump and that communicates the shield outside gap into the shield cavity lower portion. The shield auxiliary slit may be formed between the top cryopanel and the shield main slit in the axial direction.