The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Feb. 01, 2016
Applicant:
Brooks Automation, Inc., Chelmsford, MA (US);
Inventors:
Sergei Syssoev, Townsend, MA (US);
Allen J. Bartlett, Uxbridge, MA (US);
John J. Casello, Norton, MA (US);
Jeffrey A. Wells, Milford, NH (US);
Michael J. Eacobacci, Jr., South Attleboro, MA (US);
Assignee:
Brooks Automation, Inc., Chelmsford, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
F04B 37/08 (2006.01); B01D 8/00 (2006.01);
U.S. Cl.
CPC ...
F04B 37/08 (2013.01); B01D 8/00 (2013.01); Y10T 29/49236 (2015.01);
Abstract
A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.