The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Sep. 03, 2014
Applicant:
Dow Corning Corporation, Midland, MI (US);
Inventor:
Xiaobing Zhou, Midland, MI (US);
Assignee:
DOW CORNING CORPORTION, Midland, MI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 33/04 (2006.01); C07F 7/02 (2006.01); C23C 16/24 (2006.01); H01L 21/02 (2006.01); C23C 18/12 (2006.01); C23C 16/50 (2006.01);
U.S. Cl.
CPC ...
C01B 33/04 (2013.01); C07F 7/025 (2013.01); C23C 16/24 (2013.01); C23C 16/50 (2013.01); C23C 18/1212 (2013.01); H01L 21/0214 (2013.01); H01L 21/0217 (2013.01); H01L 21/0262 (2013.01); H01L 21/02164 (2013.01); H01L 21/02211 (2013.01); H01L 21/02274 (2013.01); H01L 21/02282 (2013.01); H01L 21/02529 (2013.01); H01L 21/02532 (2013.01); H01L 21/02628 (2013.01); H01L 21/02639 (2013.01);
Abstract
A compound that is 2,2,4,4-tetrasilylpentasilane, chemical compositions comprising same, methods of making and purifying 2,2,4,4-tetrasilylpentasilane, the purified 2,2,4,4-tetrasilylpentasilane prepared thereby, and methods of forming silicon-containing materials using 2,2,4,4-tetrasilylpentasilane as a precursor.