The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Jan. 24, 2017
Applicant:
Cirrus Logic International Semiconductor Ltd., Edinburgh, GB;
Inventor:
Marek Sebastian Piechocinski, Edinburgh, GB;
Assignee:
Cirrus Logic, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H04R 7/26 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); H04R 19/04 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0061 (2013.01); B81C 1/00158 (2013.01); G01L 9/0073 (2013.01); H04R 7/26 (2013.01); H04R 19/04 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0323 (2013.01); B81B 2207/012 (2013.01); H04R 2201/003 (2013.01);
Abstract
The application describes MEMS transducers and associated methods of fabrication. The MEMS transducer has a flexible membrane with a vent structure comprising a moveable portion which opens in response to a differential pressure across the membrane to provide a flow path through the membrane. At least one edge of the moveable portion comprises one or more protrusions and/or recesses in the plane of the moveable portion.