The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Mar. 17, 2015
Rohm Co., Ltd., Kyoto, JP;
Takaya Nagahata, Kyoto, JP;
ROHM CO., LTD., Kyoto, JP;
Abstract
An inkjet printing head includes a pressure chamber, a vibrating film formation layer including a vibrating film defining the pressure chamber, and a piezoelectric element disposed on the vibrating film. The piezoelectric element includes a lower electrode formed on the vibrating film formation layer, a piezoelectric film formed on the lower electrode, and an upper electrode formed on the piezoelectric film. The lower electrode includes a crossover region crossing over a peripheral edge of the top surface portion of the pressure chamber in a plan view. In the lower electrode, a thickness of the crossover region and a portion, excluding the crossover region, of an inner electrode region, disposed at an inner side of peripheral edges of the top surface portion of the pressure chamber in a plan view, is defined to be thinner than a thickness of other portions of the lower electrode.