The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2018
Filed:
Jul. 30, 2015
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventor:
Kenichi Kurokawa, Nagano, JP;
Assignee:
Seiko Epson Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); H01L 41/04 (2006.01); G01S 15/89 (2006.01); A61B 8/00 (2006.01); G01S 7/52 (2006.01); B06B 1/06 (2006.01); H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
A61B 8/4483 (2013.01); A61B 8/4427 (2013.01); B06B 1/067 (2013.01); B06B 1/0629 (2013.01); G01S 7/52079 (2013.01); H01L 41/08 (2013.01);
Abstract
A piezoelectric device includes a base, a vibration film, and a piezoelectric element. The base of the piezoelectric device has at least one opening. The opening is closed by the vibration film. The piezoelectric element is located on the vibration film. The vibration film includes a first layer that is has lower water permeability than silicon oxide and a second layer that is in close contact with the first layer and that has a larger toughness value than the first layer.