The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 20, 2018

Filed:

Sep. 01, 2016
Applicant:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Inventors:

Tadashi Sakai, Yokohama, JP;

Yuichi Yamazaki, Inagi, JP;

Hisao Miyazaki, Yokohama, JP;

Masayuki Katagiri, Kawasaki, JP;

Taishi Ishikura, Kuwana, JP;

Akihiro Kajita, Yokkaichi, JP;

Assignee:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05K 1/09 (2006.01); H05K 1/11 (2006.01); H05K 1/03 (2006.01); H05K 3/14 (2006.01); H05K 3/40 (2006.01); G11C 11/00 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H05K 1/09 (2013.01); G11C 11/00 (2013.01); H01L 21/768 (2013.01); H05K 1/0306 (2013.01); H05K 1/115 (2013.01); H05K 3/146 (2013.01); H05K 3/4076 (2013.01); H05K 2201/0323 (2013.01);
Abstract

A graphene wiring structure of an embodiment has a substrate, a metal part on the substrate, multilayered graphene connected to the metal part, a first insulative film on the substrate, and a second insulative film on the substrate. The metal part is present between the first insulative film and the second insulative film. Edges of the multilayered graphene are connected to the metal part. A side face of the first insulative film vertical to the substrate opposes a side face of the second insulative film vertical to the substrate. A first outer face of the multilayered graphene is in physical contact with a first side face of the first insulative film vertical to the substrate. A second outer face of the multilayered graphene is in physical contact with a second side face of the second insulative film vertical to the substrate.


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