The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2018
Filed:
Sep. 23, 2015
Agilent Technologies, Inc., Santa Clara, CA (US);
Christopher Ryan Moon, Los Gatos, CA (US);
Agilent Technologies, Inc., Santa Clara, CA (US);
Abstract
A scanner and method for using the same are disclosed. The scanner includes a stage, a MIR light source, an imaging system, and a controller. The stage is adapted to hold a specimen to be imaged and to move the specimen in a first direction and in a second direction that is orthogonal to the lateral direction. The imaging system forms an image plane of the specimen when the stage is positioned at a second direction distance, z, from a known point in the imaging system. The imaging system forms a plurality of different image planes of the specimen at the illumination wavelength. Each of the plurality of image planes is characterized by a different value of z, the controller determining a value of z for each of a plurality of points on the specimen at which the point on the specimen is in focus.