The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 20, 2018

Filed:

May. 16, 2016
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Ralf Richter, Radebeul, DE;

Martin Gerhardt, Dresden, DE;

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 27/11531 (2017.01); H01L 27/11524 (2017.01); H01L 27/11548 (2017.01); H01L 27/11519 (2017.01); H01L 29/43 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11531 (2013.01); H01L 27/11519 (2013.01); H01L 27/11524 (2013.01); H01L 27/11548 (2013.01); H01L 29/435 (2013.01);
Abstract

A method includes providing a semiconductor structure having a gate structure arrangement provided over a substrate. The gate structure arrangement includes one or more first gate structures and has a first sidewall and a second sidewall on opposite sides of the gate structure arrangement. A second gate structure is formed including a first portion at the first sidewall, a second portion at the second sidewall and a third portion connecting the first and second portions. Each of the first, second and third portions of the second gate structure includes a first part over the gate structure arrangement and a second part over a portion of the substrate adjacent the gate structure arrangement. After the formation of the second gate structure, one or more sections of the second gate structure are removed, wherein the first and second portions of the second gate structure are separated from each other.


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