The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2018
Filed:
May. 04, 2016
Wallace W Lin, San Jose, CA (US);
Wallace W Lin, San Jose, CA (US);
Other;
Abstract
A method for preparing a non-reference transistor test structure having multiple terminals is disclosed. The method may include when an intended application of the non-reference transistor test structure is not for monitoring a plasma-involved charging, employing a protection mechanism by placing the MOSFET-based gated diode at a first metal layer, wherein the first metal layer is a lowermost metal layer, and when the intended application of the non-reference transistor test structure is for monitoring a plasma-involved charging, placing a charging monitoring antenna at a second metal layer; and employing the protection mechanism by placing a MOSFET-based gated diode at one metal layer above the second metal layer.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile