The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9922888 B1

PDF
Full Text
Expired
Date of Patent:
Mar. 20, 2018

Filed:

May. 02, 2016
Applicant:

Tsinghua University, Beijing, CN;

Inventors:

Jun Fu, Beijing, CN;

Yu-dong Wang, Beijing, CN;

Jie Cui, Beijing, CN;

Yue Zhao, Beijing, CN;

Wen-pu Cui, Beijing, CN;

Zhi-hong Liu, Beijing, CN;

Assignee:

Tsinghua University, Beijing, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2014.01); H01L 21/66 (2006.01); G01R 27/28 (2006.01); G01R 27/26 (2006.01); G01R 27/02 (2006.01);
U.S. Cl.
CPC ...
H01L 22/14 (2013.01); G01R 27/02 (2013.01); G01R 27/2623 (2013.01); G01R 27/28 (2013.01); H01L 22/32 (2013.01);
Abstract

The present invention provides a general four-port on-wafer high frequency de-embedding method. The method comprises: for each on-wafer de-embedding dummy, building a model considering the distributive nature of high frequency characteristics of the on-wafer de-embedding dummy; obtaining the intrinsic Y-parameter admittance matrix of said N on-wafer de-embedding dummies by calculation or simulation by using said models; and solving the equation set which the corresponding measurement and calculation or simulation data of said on-wafer de-embedding dummies satisfy for the elements of the related admittance matrices of the parasitic four-port network to be stripped in de-embedding and model parameters of models on which said calculation or simulation is based.


Find Patent Forward Citations

Fu, Jun. (2018). General four-port on-wafer high frequency de-embedding method (U.S. Patent No. 9922888). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9922888

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