The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2018
Filed:
Nov. 18, 2014
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Joseph M. Ranish, San Jose, CA (US);
Oleg V. Serebryanov, San Jose, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01K 1/46 (2006.01); H01K 1/36 (2006.01); H01K 1/66 (2006.01); H05B 3/00 (2006.01);
U.S. Cl.
CPC ...
H01K 1/46 (2013.01); H01K 1/36 (2013.01); H01K 1/66 (2013.01); H05B 3/0038 (2013.01);
Abstract
Embodiments of the present disclosure generally relate to an improved adapter for simplified lamps for use as a source of heat radiation in a rapid thermal processing (RTP) chamber. In one embodiment, a lamp assembly is provided. The lamp element includes a capsule having a filament disposed therein, a press seal extending from the capsule, and an adapter having a receptacle contoured to receive at least a portion of the press seal, wherein the press seal is removably engaged with the adapter.