The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 20, 2018

Filed:

Dec. 03, 2015
Applicant:

Sensirion Ag, Stäfa, CH;

Inventors:

Mark Hornung, Stäfa, CH;

Remo Fürst, Stäfa, CH;

Thomas Huber, Stäfa, CH;

Assignee:

Sensirion AG, Stäfa, CH;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05D 7/00 (2006.01); G01N 25/18 (2006.01); G01N 33/00 (2006.01); G01F 1/684 (2006.01); G01F 1/692 (2006.01); G01F 1/696 (2006.01); G01F 1/74 (2006.01);
U.S. Cl.
CPC ...
G05D 7/00 (2013.01); G01F 1/6845 (2013.01); G01F 1/692 (2013.01); G01F 1/6965 (2013.01); G01F 1/74 (2013.01); G01N 25/18 (2013.01); G01N 33/0027 (2013.01);
Abstract

A method for determining a fluid composition parameter, e.g., a fluid identifier, a mixing ratio or a parameter describing heat transfer properties, of an unknown fluid in a mass flow controller is disclosed. A control valve of the mass flow controller is set so as to establish a constant flow, preferably zero flow, through the mass flow controller. A heating element of the flow sensor is heated, and at least one temperature value is measured with temperature sensors arranged on both sides of the heater while the fluid contacts the flow sensor. First calibration data (LUT) are retrieved. The first calibration data have, as input values, temperature values measured with the flow sensor at the previously established constant flow and have, as output values, values of the fluid composition parameter. The first calibration data are used to determine the fluid composition parameter from the measured temperature value.


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