The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2018
Filed:
Sep. 02, 2016
Toyota Jidosha Kabushiki Kaisha, Toyota-shi, Aichi-ken, JP;
Yohei Shindo, Susono, JP;
Taishi Shiotsuki, Susono, JP;
Hideyuki Koga, Susono, JP;
Maarit Karppinen, Espoo, FI;
Mikko Nisula, Espoo, FI;
Toyota Jidosha Kabushiki Kaisha, Toyota-shi, JP;
Abstract
A method for producing a lithium phosphorus oxynitride layer having high ionic conductivity is provided. The method for producing a lithium phosphorus oxynitride layer on a substrate by atomic layer deposition comprises an atmosphere interchanging step, wherein the atmosphere surrounding the substrate is alternately switched between a first atmosphere, containing a first precursor such as a dialkyl phosphoramidate and/or alkyl phosphorodiamidate, and a second atmosphere, containing a second precursor such as a lithium hexaalkyl disilazide.