The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2018
Filed:
Aug. 21, 2013
Hitachi Chemical Company, Ltd., Chiyoda-ku, Tokyo, JP;
Shunsuke Ueda, Tsukuba, JP;
Eisuke Haba, Tsukuba, JP;
HITACHI CHEMICAL COMPANY, LTD., Tokyo, JP;
Abstract
A drum sputtering device that can uniformly deposit target atoms on all over particles is provided. The drum sputtering device includes a vacuum containerthat contains particles, a tubular drumthat is arranged inside the vacuum containerand at least one end faceof which is open, and a sputtering targetthat is arranged inside the drum. With a supporting arm, a drive motorfor rotation, a drive motorfor swing, a first gear member, and a second gear member, the drum can be rotated around the axis of the drumand the drumcan be swung so that one end portionand the other end portionin the axial direction of the drumare relatively vertically switched.