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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9919917 B1

PDFFull Text
Date of Patent:
Mar. 20, 2018

Filed:

Oct. 14, 2014

Inertial sensor and method of manufacturing the same

Applicant:

Samsung Electro-mechanics Co., Ltd., Suwon-Si, KR;

Inventors:

Jong Woon Kim, Suwon-Si, KR;

Won Kyu Jeung, Suwon-Si, KR;

Assignee:

Samsung Electro-Mechanics Co., Ltd., Suwon-si, KR;

Attorney:

NSIP Law

Primary Examiner:

Anita K Alanko

Int. Cl.
CPC ...
B81C 1/00 (2006.01); G01P 15/08 (2006.01); G01P 15/09 (2006.01); G01P 15/18 (2013.01); G01C 19/56 (2012.01); B81B 3/00 (2006.01); C09K 13/08 (2006.01); C09K 13/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00158 (2013.01); G01C 19/56 (2013.01); G01P 15/0802 (2013.01); G01P 15/0922 (2013.01); G01P 15/18 (2013.01); B81B 3/007 (2013.01); B81B 3/0062 (2013.01); B81B 2201/0235 (2013.01); B81B 2203/053 (2013.01); B81C 1/00484 (2013.01); B81C 1/00531 (2013.01); B81C 1/00539 (2013.01); B81C 1/00571 (2013.01); B81C 2201/01 (2013.01); B81C 2201/014 (2013.01); B81C 2201/0132 (2013.01); B81C 2201/0133 (2013.01); C09K 13/00 (2013.01); C09K 13/08 (2013.01); G01P 2015/084 (2013.01); G01P 2015/0871 (2013.01);
Abstract

Disclosed herein an inertial sensor and a method of manufacturing the same. An inertial sensoraccording to a preferred embodiment of the present invention is configured to include a plate-shaped membrane, a mass bodythat includes an adhesive partdisposed under a central portionof the membraneand provided at the central portion thereof and a patterning partprovided at an outer side of the adhesive partand patterned to vertically penetrate therethrough, and a first adhesive layerthat is formed between the membraneand the adhesive partand is provided at an inner side of the patterning part. An area of the first adhesive layeris narrow by isotropic etching using the patterning partas a mask, thereby making it possible to improve sensitivity of the inertial sensor

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