The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2018
Filed:
Sep. 07, 2016
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Yoichi Naganuma, Matsumoto, JP;
Eiju Hirai, Azumino, JP;
Toshiaki Hamaguchi, Fujimi-machi, JP;
Motoki Takabe, Shiojiri, JP;
Assignee:
Seiko Epson Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/14 (2006.01); B81C 3/00 (2006.01); B41J 2/16 (2006.01);
U.S. Cl.
CPC ...
B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/164 (2013.01); B41J 2/1623 (2013.01); B41J 2/1628 (2013.01); B41J 2/1632 (2013.01); B81C 3/001 (2013.01); B41J 2002/14241 (2013.01); B41J 2002/14362 (2013.01); B81C 2203/032 (2013.01);
Abstract
A MEMS device includes a first substrate and a second substrate that is disposed laminated on the first substrate and has a piezoelectric element on the first substrate side, in which the first substrate and the second substrate are substantially the same size, and in planar view, an end of the first substrate and an end of the second substrate are disposed at substantially the same position.