The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2018
Filed:
Apr. 24, 2015
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Kazuya Okamoto, Yokohama, JP;
Isao Sugaya, Kawasaki, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 41/00 (2006.01); B32B 38/18 (2006.01); B32B 37/00 (2006.01); B32B 37/18 (2006.01);
U.S. Cl.
CPC ...
B32B 41/00 (2013.01); B32B 37/0046 (2013.01); B32B 37/18 (2013.01); B32B 38/18 (2013.01);
Abstract
A substrate aligning apparatus comprising: an aligning section that aligns a first substrate and a second substrate together; an acquiring section that acquires positional information on at least one of the first substrate and the second substrate, by the time the first substrate and the second substrate which have been aligned in the aligning section are carried out from the aligning section; a judging that judges misalignment of the first substrate and the second substrate, based on information acquired by the acquiring section.