The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2018
Filed:
Dec. 06, 2016
Jeroen Bosboom, St. Petersburg, FL (US);
Babak Naderi, St. Petersburg, FL (US);
Richard Munro, St. Petersburg, FL (US);
Tatiana Pankova Major, St. Petersburg, FL (US);
Jeroen Bosboom, St. Petersburg, FL (US);
Babak Naderi, St. Petersburg, FL (US);
Richard Munro, St. Petersburg, FL (US);
Tatiana Pankova Major, St. Petersburg, FL (US);
Jabil Inc., St. Petersburg, FL (US);
Abstract
The disclosure provides an apparatus, system and method for providing an end effector. The end effector may be capable of accommodating semiconductor wafers of varying sizes, and may include: a wafer support; a bearing arm capable of interfacing with at least one robotic element, and at least partially bearing the wafer support at one end thereof; a plurality of support pads on the wafer support for physically interfacing with a one of the semiconductor wafers; and a low friction moving clamp driven bi-directionally along a plane at least partially provided by the bearing arm, wherein the low friction moving clamp retractably applies force to a proximal edge of the semiconductor wafer.