The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 13, 2018

Filed:

Nov. 17, 2016
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Makoto Kubota, Yokohama, JP;

Takanori Matsuda, Chofu, JP;

Kaoru Miura, Matsudo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/045 (2006.01); H01L 41/187 (2006.01); B06B 1/06 (2006.01); B41J 2/14 (2006.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01); H01L 41/09 (2006.01); H01L 41/27 (2013.01); H01L 41/297 (2013.01); H02N 2/18 (2006.01); H03H 9/64 (2006.01); A61B 8/00 (2006.01); G01C 19/56 (2012.01); G02B 26/04 (2006.01); H01L 41/318 (2013.01);
U.S. Cl.
CPC ...
H01L 41/1871 (2013.01); A61B 8/00 (2013.01); B06B 1/06 (2013.01); B41J 2/14233 (2013.01); G01C 19/56 (2013.01); G02B 26/04 (2013.01); H01L 41/047 (2013.01); H01L 41/0471 (2013.01); H01L 41/0815 (2013.01); H01L 41/09 (2013.01); H01L 41/0973 (2013.01); H01L 41/0986 (2013.01); H01L 41/27 (2013.01); H01L 41/297 (2013.01); H01L 41/318 (2013.01); H02N 2/186 (2013.01); H03H 9/64 (2013.01);
Abstract

Provided is a piezoelectric element including a substrate, electrodes, and a piezoelectric film, the piezoelectric film including an oxide including Ba, Ca, Ti, and Zr, and at least one element of Mn and Bi in which: 0.09≦x≦0.30 is satisfied, where x is a mole ratio of Ca to a sum of Ba and Ca; 0.025≦y≦0.085 is satisfied, where y is a mole ratio of Zr to a sum of Ti, Zr, and Sn; and 0≦z≦0.02 is satisfied, where z is a mole ratio of Sn to the sum of Ti, Zr, and Sn; a total content Sof Mn and Bi is 0.0020 moles or more and 0.0150 moles or less for 1 mole of the oxide; and a total content Sof Mn and Bi in a region of the piezoelectric film adjacent to one of the electrodes is smaller than S.


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