The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2018
Filed:
Aug. 16, 2016
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Inventors:
Jungwoo Song, Hwaseong-si, KR;
Jaekyu Lee, Seongnam-si, KR;
Jaerok Kahng, Seoul, KR;
YongJun Kim, Hwaseong-si, KR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01); H01L 29/40 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 29/423 (2006.01); H01L 27/22 (2006.01);
U.S. Cl.
CPC ...
H01L 29/408 (2013.01); H01L 27/10823 (2013.01); H01L 27/10852 (2013.01); H01L 27/10855 (2013.01); H01L 27/10891 (2013.01); H01L 29/4236 (2013.01); H01L 29/66666 (2013.01); H01L 29/7827 (2013.01); H01L 27/10811 (2013.01); H01L 27/228 (2013.01);
Abstract
A semiconductor device includes active pillars protruding from a semiconductor substrate and spaced apart from each other in a first direction and a second direction that is perpendicular to the first direction, a word line extending in the first direction between the active pillars, a drain region disposed in an upper portion of each of the active pillars, and a separation pattern provided between the word line and the drain region. A bottom surface of the separation pattern is disposed at a lower level than a bottom surface of the drain region.