The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 13, 2018

Filed:

Jun. 23, 2016
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventor:

Nobuhiko Sato, Yokohama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/30 (2006.01); H04N 5/335 (2011.01); H01L 51/44 (2006.01); H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
H01L 27/307 (2013.01); H01L 27/14632 (2013.01); H01L 27/14636 (2013.01); H01L 27/14665 (2013.01); H01L 27/14687 (2013.01); H01L 51/442 (2013.01); H01L 51/447 (2013.01); H01L 51/448 (2013.01); H04N 5/335 (2013.01); H01L 27/14621 (2013.01); H01L 2251/301 (2013.01);
Abstract

A method for manufacturing a photoelectric converter includes a first step of preparing a semiconductor substrate including a metal oxide semiconductor (MOS) transistor, a second step of forming a plurality of interlayer insulating films above the semiconductor substrate, and a third step of forming a photoelectric conversion portion above the semiconductor substrate. The second step includes a step of forming a first film containing hydrogen. The third step includes a step of forming a first electrode, a step of forming a photoelectric conversion film, and a step of forming a second electrode. The method includes a step of performing heat treatment between the step of forming the first film and the step of forming the photoelectric conversion film.


Find Patent Forward Citations

Loading…