The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2018
Filed:
Oct. 20, 2014
Hamamatsu Photonics K.k., Hamamatsu-shi, Shizuoka, JP;
Koyo Watanabe, Hamamatsu, JP;
Naoya Matsumoto, Hamamatsu, JP;
HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;
Abstract
A total internal reflection light illumination apparatus includes a light source providing illumination light L, a spatial light modulator inputting the illumination light Land converging and outputting the illumination light Lby presenting a lens pattern, an objective lens illuminating an object substrate with illumination light Lconverged and output by the spatial light modulator, and a calculation unit providing, to the spatial light modulator, the lens pattern corresponding to at least one of a desired polarization state, desired penetration length, desired shape, and desired light intensity of the evanescent light L. The lens pattern converges the illumination light Lon a pupil plane of the objective lens.