The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2018
Filed:
Apr. 08, 2016
Applicant:
Sensortek Technology Corp., Hsinchu County, TW;
Inventors:
Hsin-Hung Huang, Hsinchu County, TW;
Wei-Yang Ou, Hsinchu County, TW;
Hung-Sen Chen, Hsinchu County, TW;
Assignee:
SensorTek technology Corp., Hsinchu County, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/12 (2006.01); B81C 99/00 (2010.01); G01P 21/00 (2006.01); G01C 19/5783 (2012.01); G01C 25/00 (2006.01); G01P 15/08 (2006.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
G01P 21/00 (2013.01); G01C 19/5783 (2013.01); G01C 25/00 (2013.01); G01P 15/0802 (2013.01); G01P 15/125 (2013.01); B81C 99/0045 (2013.01); G01P 2015/0814 (2013.01); G01P 2015/0831 (2013.01);
Abstract
A method of detecting whether a microelectromechanical system (MEMS) device is hermetic includes applying at least three voltage differences between a movable part and a sensor electrode of the MEMS device to measure at least three effective capacitances, calculating a capacitance-to-voltage curve and an offset voltage of the MEMS device according to the at least three effective capacitances; and determining whether the offset voltage is within a predetermined range to determine whether MEMS device is hermetic.