logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9915679 B1

PDFFull Text
Date of Patent:
Mar. 13, 2018

Filed:

Apr. 08, 2016

Method of detecting whether microelectromechanical system device is hermetic

Applicant:

Sensortek Technology Corp., Hsinchu County, TW;

Inventors:

Hsin-Hung Huang, Hsinchu County, TW;

Wei-Yang Ou, Hsinchu County, TW;

Hung-Sen Chen, Hsinchu County, TW;

Assignee:

SensorTek technology Corp., Hsinchu County, TW;

Attorney:

Winston Hsu

Primary Examiner:

David A Rogers

Int. Cl.
CPC ...
G01P 15/12 (2006.01); B81C 99/00 (2010.01); G01P 21/00 (2006.01); G01C 19/5783 (2012.01); G01C 25/00 (2006.01); G01P 15/08 (2006.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
G01P 21/00 (2013.01); G01C 19/5783 (2013.01); G01C 25/00 (2013.01); G01P 15/0802 (2013.01); G01P 15/125 (2013.01); B81C 99/0045 (2013.01); G01P 2015/0814 (2013.01); G01P 2015/0831 (2013.01);
Abstract

A method of detecting whether a microelectromechanical system (MEMS) device is hermetic includes applying at least three voltage differences between a movable part and a sensor electrode of the MEMS device to measure at least three effective capacitances, calculating a capacitance-to-voltage curve and an offset voltage of the MEMS device according to the at least three effective capacitances; and determining whether the offset voltage is within a predetermined range to determine whether MEMS device is hermetic.

Find Patent Forward Citations

Huang, Hsin-Hung. (2018). Method of detecting whether microelectromechanical system device is hermetic (U.S. Patent No. 9915679). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9915679

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…