The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2018
Filed:
Sep. 29, 2014
Applicants:
The University of Tokyo, Bunkyo-ku, Tokyo, JP;
Kabushiki Kaisha Saginomiya Seisakusho, Nakano-ku, Tokyo, JP;
Inventors:
Hiroyuki Fujita, Tokyo, JP;
Gen Hashiguchi, Tokyo, JP;
Hiroyuki Mitsuya, Sayama, JP;
Hisayuki Ashizawa, Sayama, JP;
Assignees:
The University of Tokyo, Tokyo, JP;
Kabushiki Kaisha Saginomiya Seisakusho, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/10 (2006.01); G01L 9/12 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0016 (2013.01);
Abstract
A pressure sensor includes: a fixed part; a ring-like oscillator that is supported on the fixed part by a plurality of support beams; a plurality of electrodes that are provided on the fixed part and arranged in an oscillating direction of the ring-like oscillator with a gap; electret films that are formed on either one of opposite surfaces of the ring-like oscillator and the electrodes.