The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9915261 B1

Date of Patent:

Mar. 13, 2018

Filed:

Oct. 30, 2014

Substrate treating apparatus, drive assembly, and drive member controlling method

Applicant:

Semes Co., Ltd., Cheonan-si, Chungcheongnam-do, KR;

Inventors:

Jin Ho Choi, Cheonan-si, KR;

Ju Mi Yoo, Cheonan-si, KR;

Assignee:

Semes Co., Ltd., Chungcheongnam-Do, KR;

Attorney:

Harness, Dickey & Pierce, P.L.C.

Primary Examiner:

Michael Leslie

Int. Cl.

CPC ...

F16D 31/02 (2006.01); F04B 49/20 (2006.01); H01L 21/67 (2006.01); F04B 49/06 (2006.01); F04B 49/10 (2006.01); H01L 21/677 (2006.01);

U.S. Cl.

CPC ...

F04B 49/20 (2013.01); F04B 49/06 (2013.01); F04B 49/103 (2013.01); H01L 21/67259 (2013.01); H01L 21/67742 (2013.01); F04B 2201/0201 (2013.01); F04B 2201/0202 (2013.01);

Abstract

Provided is a substrate treating apparatus. The substrate treating apparatus includes: a transfer chamber conveying a substrate; a process chamber disposed adjacent to the transfer chamber and performing a treating process o the substrate; and a drive assembly supplying a power by which a component of the transfer chamber or the process chamber operates, wherein the drive assembly includes: a cylinder connected to pipes; a piston disposed to be movable inside the cylinder and connected to the component by a drive shaft; and a pipe control unit automatically adjusting a moving speed of the piston.

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