The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2018
Filed:
Jan. 12, 2016
Applicant:
Sensirion Ag, Stafa, CH;
Inventors:
David Pustan, Zurich, CH;
Werner Hunziker, Stafa, CH;
Assignee:
Sensirion AG, Stafa, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); B81C 1/00 (2006.01); H01L 23/31 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0081 (2013.01); B81C 1/0069 (2013.01); B81C 1/00158 (2013.01); G01N 33/0009 (2013.01); B81B 2201/0278 (2013.01); B81B 2203/0127 (2013.01); B81B 2207/098 (2013.01); H01L 23/3107 (2013.01); H01L 2924/0002 (2013.01);
Abstract
A sensor package comprises a carrier comprising a through hole, and a sensor chip with a front side and a back side and a recess in the back side. The sensor chip is attached to the carrier with its back side facing the carrier by means of an attachment layer thereby defining a first area of the carrier the sensor chip rests on and a second area of the carrier facing the recess. The through hole is arranged in the first area of the carrier.