The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 06, 2018

Filed:

Sep. 04, 2015
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Bruce A. Ek, Pelham Manor, NY (US);

Talia S. Gershon, White Plains, NY (US);

Supratik Guha, Chappaqua, NY (US);

Oki Gunawan, Fair Lawn, NJ (US);

Teodor K. Todorov, Yorktown Heights, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/44 (2006.01); H01L 51/00 (2006.01); H01L 31/032 (2006.01); H01L 31/0725 (2012.01); H01L 51/42 (2006.01);
U.S. Cl.
CPC ...
H01L 51/442 (2013.01); H01L 31/0326 (2013.01); H01L 31/0725 (2013.01); H01L 51/0021 (2013.01); H01L 51/4213 (2013.01); Y02E 10/549 (2013.01);
Abstract

Techniques for forming a transparent conducting oxide (TCO) top contact using a low temperature process are provided. In one aspect of the invention, a method of forming a TCO on a substrate is provided. The method includes the steps of: generating a source gas of the TCO using e-beam evaporation; generating atomic oxygen using RF plasma; and contacting the substrate with the TCO source gas and the atomic oxygen under conditions sufficient to form the TCO on the substrate. A photovoltaic device is also provided which includes a bottom cell; and a perovskite-based top cell on the kesterite-based bottom cell. The perovskite-based top cell includes a top electrode formed from a TCO.


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