The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2018
Filed:
Mar. 09, 2016
Toshiba Memory Corporation, Tokyo, JP;
Ai Furubayashi, Yokohama, JP;
Takaki Hashimoto, Yokohama, JP;
TOSHIBA MEMORY CORPORATION, Tokyo, JP;
Abstract
According to one embodiment, in a measurement apparatus, a controller acquires a first signal waveform, a second signal waveform, and a third signal waveform. Among mdiffraction light and ±ndiffraction light, the first signal waveform is related to spatial distribution of light intensity about first interference light by interference of the ±ndiffraction light. The second signal waveform is related to spatial distribution of light intensity about second interference light by interference of the mdiffraction light and the +ndiffraction light. The third signal waveform is related to spatial distribution of light intensity about third interference light by interference of the mdiffraction light and the −ndiffraction light. The controller calculates a measurement error component based on a phase difference between the second signal waveform and the third signal waveform. The controller corrects the first signal waveform with using the calculated measurement error component.