The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2018
Filed:
May. 25, 2016
Nikon Corporation, Tokyo, JP;
Yoshihiko Suzuki, Funabashi, JP;
Junji Suzuki, Tama, JP;
NIKON CORPORATION, Tokyo, JP;
Abstract
A spatial light modulator comprises, a first light modulation element having a substrate, a reflecting mirror, a movable portion displaced relative to the substrate while supporting the reflecting mirror, and a top electrode adsorbing the movable portion by electrostatic force between the movable portion and the top electrode in a position farther away from the substrate than the movable portion, a second light modulation element placed adjacent to the first light modulation element in the substrate, having a reflecting mirror, a movable portion displaced relative to the substrate while supporting the reflecting mirror, and a top electrode adsorbing the movable portion by electrostatic force between the movable portion and the top electrode in a position farther away from the substrate than the movable portion, and electrode supporting portions commonly supporting the top electrodes of the first light modulation element and the second light modulation element relative to the substrate.